SMC 22-MSQA10R | Copper/Fluorine/Silicon-Free Rotary Table MSQ Series Size 10 R-Type
SMCThe SMC 22-MSQA10R is a copper, fluorine, and silicon-free rotary table from the MSQ series. Part number decoded: MSQ = MSQ rotary table, A = A-type body, 10 = size 10, R = R-type vane mechanism. The 22- prefix designates Cu/F/Si-free construction for semiconductor front-end environments.
The MSQ rotary table provides precision angular indexing with a vane mechanism at size 10. The Cu/F/Si-free construction ensures no trace contamination from the rotary mechanism, critical for rotary indexing operations in semiconductor equipment where the table directly handles or positions process-sensitive components. The size 10 is the most compact MSQ providing Cu/F/Si-free rotary motion.
The 22-MSQA10R provides Cu/F/Si-free rotary indexing. For the standard clean room MSQ (11-), the 11-MSQA10R provides the base clean room option. For Cu/F/Si-free larger rotary tables, the 22-MSQB20R provides size 20. For Cu/F/Si-free linear actuation, the 22-CXS and 22-MXQ series provide slide table options. For auto-switch capability, add switch brackets or M9P/M9B suffixes. RoHS compliant.
- Series:
- 22-MSQ (Cu/F/Si-Free)
- Actuator Type:
- Rotary Table
- Size:
- 10
- Mechanism:
- R-Type (Vane)
- Material:
- Copper Fluorine Silicon Free
- Certifications:
- RoHS