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SMC XLD-40 Aluminum, High Vacuum Angle Valve

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SKU:
XLD-40
Condition:
New
Valve Type:
Smooth Exhaust, Normally Closed, Bellows, O-ring Seal
Flange Size:
40
Flange Type:
NW
Port Direction:
w/o Indicator, Flange Side, Std. Indicator, Flange Side
Temperature:
5 to 60??C
Flange Size Specification:
Not Applicable
Auto Switch:
w/o Auto Switch and w/o Built-in Magnet
Lead Wire:
Or None in the Case of No Auto Switch
Non-standard Indicator:
Standard
Body Surface Treatment:
Standard: External - Hard Anodized, Internal - Raw Material
Seal Material:
1349-80
$781.00

Description

XLD, Aluminum High Vacuum Angle Valve, Air Operated

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

- Light weight and compact
- Uniform baking temperature
- High fluorine resistance
- Low outgassing
- Little heavy metal contamination
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Series Catalog

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