Slit Valves

Slit Valves

  • SMC XGTP313-50336-1F High Vacuum Valve

    SMC XGTP313-50336-1F High Vacuum Valve

    $10,200.00
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGTP313-50336-1F
    $10,200.00
  • SMC XGTP311-50336-1C High Vacuum Valve

    SMC XGTP311-50336-1C High Vacuum Valve

    $8,200.00
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGTP311-50336-1C
    $8,200.00
  • SMC XGTP312-50336-1FN High Vacuum Valve

    SMC XGTP312-50336-1FN High Vacuum Valve

    $10,150.00
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGTP312-50336-1FN
    $10,150.00
  • SMC XGTP312-50336-1C high vacuum valve parallel seal type slit valve

    SMC XGTP312-50336-1C High Vacuum Valve

    $10,200.00
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGTP312-50336-1C
    $10,200.00
  • SMC XGT313-50336-1F High Vacuum Valve

    SMC XGT313-50336-1F High Vacuum Valve

    $10,760.45
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT313-50336-1F
    $10,760.45
  • SMC XGT312-50336-1 high vacuum valve high vacuum slit valve

    SMC XGT312-50336-1 High Vacuum Valve

    $10,564.55
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT312-50336-1
    $10,564.55
  • SMC XGT311-50336-1F High Vacuum Valve

    SMC XGT311-50336-1F High Vacuum Valve

    $8,582.65
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT311-50336-1F
    $8,582.65
  • SMC XGT311-50336-1C High Vacuum Valve

    SMC XGT311-50336-1C High Vacuum Valve

    $8,610.80
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT311-50336-1C
    $8,610.80
  • SMC XGT222-46236-2F High Vacuum Valve

    SMC XGT222-46236-2F High Vacuum Valve

    $8,057.90
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-2F
    $8,057.90
  • <h2>XGT*, High Vacuum Slit Valve</h2><p><h3>Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.</h3>- Long service life: 3 million cycles (within standard temperture range)<br>- Low particle generation: reduced by 1/5 or more (compared with the current product)<br>- Easier maintenance<br>- Easy replacement of bellows<br>- Gate can be replaced from above (Made to order)<br>- Safety measures<br>- A mechanical end lock mechanism has been adopted<br>- <p><a href="https://content2.smcetech.com/pdf/XGT.pdf" target="_blank">Series Catalog</a>

    SMC XGT222-46236-2C High Vacuum Slit Valve

    $7,980.35
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-2C
    $7,980.35
  • SMC XGT222-46236-1F High Vacuum Valve

    SMC XGT222-46236-1F High Vacuum Valve

    $7,168.40
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-1F
    $7,168.40
  • SMC XGT222-46236-1A high vacuum valve high vacuum slit valve

    SMC XGT222-46236-1A High Vacuum Valve

    $7,107.05
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-1A
    $7,107.05
  • <h2>XGT*, High Vacuum Slit Valve</h2><p><h3>Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.</h3>- Long service life: 3 million cycles (within standard temperture range)<br>- Low particle generation: reduced by 1/5 or more (compared with the current product)<br>- Easier maintenance<br>- Easy replacement of bellows<br>- Gate can be replaced from above (Made to order)<br>- Safety measures<br>- A mechanical end lock mechanism has been adopted<br>- <p><a href="https://content2.smcetech.com/pdf/XGT.pdf" target="_blank">Series Catalog</a>

    SMC XGT222-32222-2F High Vacuum Slit Valve

    $7,529.35
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-32222-2F
    $7,529.35
  • SMC XGT222-46236-1C High Vacuum Valve

    SMC XGT222-46236-1C High Vacuum Valve

    $7,153.05
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-1C
    $7,153.05