Description
XLJ, Vacuum Angle Valve w/Release Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Compatible with inert gases- Flange sizes: 25 and 40
- Operating pressure range: Atmospheric to 0.01 Pa
- Operating temperature: 5-40 (12, 24)VDC
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