SMC 10-VQ110L-5LO-M5 | Clean Room 3-Port Solenoid Valve VQ100 Series Compact Direct Operated M5 Port 24VDC
SMC
$36.20
The SMC 10-VQ110L-5LO-M5 is a clean room specification 3-port solenoid valve from the VQ100 series, configured as a compact direct-operated type. Part number decoded: VQ110L = VQ100 series type 10L (3-port direct operated with L-type body configuration), 5LO = solenoid specification (5 = 24VDC, L = coil type, O = option), M5 = M5 metric port. The VQ100 is a distinct valve platform from both the SY and V series, offering a different design approach for compact 3-port control.
The VQ100 direct-operated design means the solenoid acts directly on the valve element without a pilot stage. This provides the fastest possible response time since there is no pilot delay, and enables operation at very low pressures (including vacuum) where pilot-operated valves may not function. Direct operation is critical in clean room applications involving vacuum switching, low-pressure signal routing, and high-speed pulse control where every millisecond of response time affects machine throughput.
The VQ110L-5LO-M5 provides compact 3-port direct-operated control at M5 port size with 24VDC operation. For pilot-operated 3-port valves with higher flow at the same size, the SYJ300 series provides an alternative. For direct-operated 5-port control, the VQD1000 series extends the VQ platform to double-acting actuator control. For manifold mounting of multiple VQ100 valves, the SS5VQ1 manifold base is available. Clean series (10-) fluorine grease, Particle Grade 1. RoHS compliant.
- Series:
- 10-VQ100 (Clean Room)
- Product Type:
- 3-Port Solenoid Valve (Direct Operated)
- Operation:
- Direct Operated (No Pilot)
- Port Size:
- M5 (Metric)
- Solenoid:
- 24VDC (5LO)
- Body Type:
- Compact (L)
- Clean Room Grade:
- Particle Generation Grade 1
- Certifications:
- RoHS
