SMC 21-VV5Q21-03C6FS0-D | Copper/Fluorine/Silicon-Free 5-Port Solenoid Valve Manifold VQ2000 Series 3-Station D-Sub Connector
SMC
$89.50
The SMC 21-VV5Q21-03C6FS0-D is a copper, fluorine, and silicon-free 5-port solenoid valve manifold from the VQ1000/2000 series with D-sub connector. Part number decoded: VV5Q21 = VQ2000 manifold base type 21, 03 = 3-station, C6 = specific configuration, FS0 = individual SUP/EXH specification, D = D-sub connector electrical interface. The 21- prefix designates Cu/F/Si-free construction.
The VQ manifold with D-sub connector provides a centralized electrical connection for all 3 valve stations through a single multi-pin connector. This simplifies wiring, reduces cable count, and enables quick maintenance disconnection. The D-sub interface is standard in semiconductor equipment, enabling plug-and-play connection to the equipment's I/O module. The Cu/F/Si-free construction ensures the highest material purity for semiconductor front-end applications.
The 21-VV5Q21-03C6FS0-D provides Cu/F/Si-free manifold valve control with centralized D-sub wiring. For standard clean room valve manifolds, the 10-SS5V and 10-SS5Y series provide the base clean room options. For different station counts at Cu/F/Si-free grade, the VV5Q series offers various configurations. For individual Cu/F/Si-free valves, consult SMC for 21- prefix SY or SV availability. RoHS compliant.
- Series:
- 21-VQ2000 (Cu/F/Si-Free)
- Product Type:
- 5-Port Solenoid Valve Manifold
- Stations:
- 3
- Connector:
- D-Sub
- Configuration:
- C6 FS0
- Material:
- Copper Fluorine Silicon Free
- Certifications:
- RoHS
