SMC HRZC010-W2S-Z | HRZC SEMI Standard Double Inverter Thermo-Chiller, 10 kW, CO2 Refrigerant (R744), Clear Water / Deionized Water, 200VAC power supply specification

The SMC HRZC010-W2S-Z is a SEMI standard double inverter recirculating thermo-chiller from the HRZC series, delivering 10 kW of cooling capacity using R744 (CO2) natural refrigerant. With a global warming potential (GWP) of just 1, the HRZC series represents the lowest possible environmental impact among industrial chillers, fully compliant with current and future regulations under the US EPA AIM Act, California CARB, Canadian refrigerant rules, and EU F-Gas directives. CO2 refrigerant is non-toxic, non-flammable, and eligible for air transport.

This model circulates clear water or deionized water with a settable temperature range of 10 to 60°C. Temperature regulation is PID-controlled with ±0.1°C stability (±0.02°C achievable under stable heat loads), meeting the precision demands of semiconductor fabrication, laser processing, and other high-technology applications. DC inverter drives on both the compressor and pump provide substantial energy savings by matching output to actual thermal demand rather than cycling on and off. This model is configured for 200VAC single-phase power supply.

The HRZC is water-cooled, connecting to facility water for heat rejection, which eliminates the need for large condenser fans and enables quiet, space-efficient operation. The front panel features a ventilation intake, emergency shutoff switch, LCD operation panel, and 30A breaker with handle. The rear panel provides circulating fluid and facility water connections, drain and fill ports, power terminals, and a ventilation exhaust fan. Casters with brakes are standard for easy relocation.

The HRZC series conforms to SEMI equipment standards S2, S8, and F47, making it immediately suitable for semiconductor cleanroom and fab environments. Standard features include a heating function, serial communication (RS-232C/RS-485), auto-restart after power interruption, anti-freeze protection, alarm monitoring with self-diagnosis, and a built-in earth leakage breaker. The HRZC010-W2S-Z replaces legacy HRZ models that used R404A or R134a refrigerants with high GWP, offering a future-proof upgrade path with matching dimensions and port layouts for simplified retrofits.