High Vacuum Products

High Vacuum Products

  • SMC XSA1-22V-5GS2 High Vacuum Valve

    SMC XSA1-22V-5GS2 High Vacuum Valve

    $187.00
    XSA, NC Type, Straight Solenoid ValveSeries XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6 Pa(absolute). Face Seal and...
    XSA1-22V-5GS2
    $187.00
  • SMC XSA1-12V-5DL2 High Vacuum Valve

    SMC XSA1-12V-5DL2 High Vacuum Valve

    $197.00
    XSA, NC Type, Straight Solenoid ValveSeries XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6 Pa(absolute). Face Seal and...
    XSA1-12V-5DL2
    $197.00
  • SMC XMD-40-XN1A High Vacuum Valve

    SMC XMD-40-XN1A High Vacuum Valve

    $890.45
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMD-40-XN1A
    $890.45
  • <h2>XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types</h2><p><h3>Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.</h3>- Angle or in-line type<br>- SCS 13 body material (conforms to SUS304)<br>- A precision casting, unified composition prevents accumulation of gas<br>- More than 2 million cycles service life (air operated valve)<br>- Light weight and compact<p><a href="https://content2.smcetech.com/pdf/XM_XY.pdf" target="_blank">Series Catalog</a>

    SMC XMA-40C S.S. High Vacuum Angle/In-Line Valve

    $441.25
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMA-40C
    $441.25
  • <h2>XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal</h2><p><h3>XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.<br>- </h3>- Air pressure applied to pilot port shifts opens piston-coupled valve<br>- Numerous maintenance parts available to extend useful life of valve<br>- Standard FKM seals, plus 8 additional seal compound options<br>- Auto switches mountable from 4-directions<br>- Optional 100 C to 150 C heaters (UL compliant lead wire)<br>- <br>- <p><a href="https://content2.smcetech.com/pdf/XL_US2.pdf" target="_blank">Series Catalog</a>

    SMC XLF-160DA-M9// Aluminum Air-Operated Angle Valve

    $2,755.00
    XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring SealXLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for...
    XLF-160DA-M9//
    $2,755.00
  • <h2>XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal</h2><p><h3>XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.<br>- </h3>- Air pressure applied to pilot port shifts opens piston-coupled valve<br>- Numerous maintenance parts available to extend useful life of valve<br>- Standard FKM seals, plus 8 additional seal compound options<br>- Auto switches mountable from 4-directions<br>- Optional 100 C to 150 C heaters (UL compliant lead wire)<br>- <br>- <p><a href="https://content2.smcetech.com/pdf/XL_US2.pdf" target="_blank">Series Catalog</a>

    SMC XLF-100DA-M9// High Vacuum Valve

    $1,947.00
    XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring SealXLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for...
    XLF-100DA-M9//
    $1,947.00
  • SMC XLD-80DLH5 High Vacuum Valve

    SMC XLD-80DLH5 High Vacuum Valve

    $1,927.15
    XLD, Aluminum High Vacuum Angle Valve, Air OperatedHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve...
    XLD-80DLH5
    $1,927.15
  • SMC XLD-50L-M9BA Aluminum, High Vacuum Angle Valve SMC XLD-50L-M9BA Aluminum, High Vacuum Angle Valve

    SMC XLD-50L-M9BA High Vacuum Valve

    $1,059.70
    XLD, Aluminum High Vacuum Angle Valve, Air OperatedHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve...
    XLD-50L-M9BA
    $1,059.70
  • SMC XLD-50-A93LA Aluminum, High Vacuum Angle Valve SMC XLD-50-A93LA Aluminum, High Vacuum Angle Valve

    SMC XLD-50-A93LA High Vacuum Valve

    $1,041.80
    XLD, Aluminum High Vacuum Angle Valve, Air OperatedHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve...
    XLD-50-A93LA
    $1,041.80
  • SMC XLD-25-M9// High Vacuum Valve SMC XLD-25-M9// High Vacuum Valve

    SMC XLD-25-M9// High Vacuum Valve

    $706.45
    XLD, Aluminum High Vacuum Angle Valve, Air OperatedHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve...
    XLD-25-M9//
    $706.45
  • SMC XLA-50-2 High Vacuum Valve

    SMC XLA-50-2 High Vacuum Valve

    $550.00
    XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows SealSeries XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include...
    XLA-50-2
    $550.00
  • SMC XLA-25-2 High Vacuum Valve

    SMC XLA-25-2 High Vacuum Valve

    $320.00
    XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows SealSeries XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include...
    XLA-25-2
    $320.00
  • SMC XGT313-50336-1F High Vacuum Valve

    SMC XGT313-50336-1F High Vacuum Valve

    $10,760.45
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT313-50336-1F
    $10,760.45
  • SMC XGT312-50336-1 high vacuum valve high vacuum slit valve

    SMC XGT312-50336-1 High Vacuum Valve

    $10,564.55
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT312-50336-1
    $10,564.55
  • SMC XGT311-50336-1F High Vacuum Valve

    SMC XGT311-50336-1F High Vacuum Valve

    $8,582.65
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT311-50336-1F
    $8,582.65
  • SMC XGT311-50336-1C High Vacuum Valve

    SMC XGT311-50336-1C High Vacuum Valve

    $8,610.80
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT311-50336-1C
    $8,610.80
  • SMC XGT222-46236-2F High Vacuum Valve

    SMC XGT222-46236-2F High Vacuum Valve

    $8,057.90
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-2F
    $8,057.90
  • <h2>XGT*, High Vacuum Slit Valve</h2><p><h3>Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.</h3>- Long service life: 3 million cycles (within standard temperture range)<br>- Low particle generation: reduced by 1/5 or more (compared with the current product)<br>- Easier maintenance<br>- Easy replacement of bellows<br>- Gate can be replaced from above (Made to order)<br>- Safety measures<br>- A mechanical end lock mechanism has been adopted<br>- <p><a href="https://content2.smcetech.com/pdf/XGT.pdf" target="_blank">Series Catalog</a>

    SMC XGT222-46236-2C High Vacuum Slit Valve

    $7,980.35
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-2C
    $7,980.35