High Vacuum Products

High Vacuum Products

  • SMC XGT222-46236-1F High Vacuum Valve

    SMC XGT222-46236-1F High Vacuum Valve

    $7,168.40
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-1F
    $7,168.40
  • SMC XGT222-46236-1A high vacuum valve high vacuum slit valve

    SMC XGT222-46236-1A High Vacuum Valve

    $7,107.05
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-46236-1A
    $7,107.05
  • <h2>XGT*, High Vacuum Slit Valve</h2><p><h3>Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.</h3>- Long service life: 3 million cycles (within standard temperture range)<br>- Low particle generation: reduced by 1/5 or more (compared with the current product)<br>- Easier maintenance<br>- Easy replacement of bellows<br>- Gate can be replaced from above (Made to order)<br>- Safety measures<br>- A mechanical end lock mechanism has been adopted<br>- <p><a href="https://content2.smcetech.com/pdf/XGT.pdf" target="_blank">Series Catalog</a>

    SMC XGT222-32222-2F High Vacuum Slit Valve

    $7,529.35
    XGT*, High Vacuum Slit ValveSeries XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.- Long...
    XGT222-32222-2F
    $7,529.35
  • <h2>XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types</h2><p><h3>Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.</h3>- Angle or in-line type<br>- SCS 13 body material (conforms to SUS304)<br>- A precision casting, unified composition prevents accumulation of gas<br>- More than 2 million cycles service life (air operated valve)<br>- Light weight and compact<p><a href="https://content2.smcetech.com/pdf/XM_XY.pdf" target="_blank">Series Catalog</a>

    SMC XYD-40 S.S. High Vacuum In-Line Valve

    $945.00
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XYD-40
    $945.00
  • SMC XYA-80 High Vacuum Valve

    SMC XYA-80 High Vacuum Valve

    $1,281.55
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XYA-80
    $1,281.55
  • SMC XYA-40H0 high vacuum valve s.s. high vacuum in-line valve

    SMC XYA-40H0 S.S. High Vacuum In-Line Valve

    $468.30
    Xm And Xy, High Vacuum Valves, Stainless Steel, Angle And In-Line TypesSeries Xm (High Vacuum Angle Valve) And Xy (High Vacuum In-Line Valve) Feature Body Materials Of Sus (Stainless Steel). The Structure Of The Xm Is The Same As The Xl, Except The Body...
    XYA-40H0
    $468.30
  • SMC XYA-25 High Vacuum Valve

    SMC XYA-25 High Vacuum Valve

    $412.15
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XYA-25
    $412.15
  • <h2>XVD2, High Vacuum Valve, Smooth Vent</h2><p><h3>Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male female) and Swagelok. Port size for the main supply is 1/4 and orifice is 3mm. Materials consist of SUS316L (body bellows), SUS304 (diaphragm) and FKM (valve and external seal).</h3>- High vacuum valve, smooth vent<br>- Operating pressure (Pa): 0.2M~10 -6<br>- Operating fluid: nitrogen, air<br>- Valve style: normally closed<br>- Material: SUS316L, SUS304, FKM<br>- <p><a href="https://content2.smcetech.com/pdf/XVD2.pdf" target="_blank">Series Catalog</a>

    SMC XVD2-02V High Vacuum Valve

    $799.85
    XVD2, High Vacuum Valve, Smooth VentSmooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male female) and Swagelok. Port size for the main supply is 1/4 and orifice is 3mm. Materials consist of SUS316L (body ...
    XVD2-02V
    $799.85
  • <h2>XVD2, High Vacuum Valve, Smooth Vent</h2><p><h3>Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male female) and Swagelok. Port size for the main supply is 1/4 and orifice is 3mm. Materials consist of SUS316L (body bellows), SUS304 (diaphragm) and FKM (valve and external seal).</h3>- High vacuum valve, smooth vent<br>- Operating pressure (Pa): 0.2M~10 -6<br>- Operating fluid: nitrogen, air<br>- Valve style: normally closed<br>- Material: SUS316L, SUS304, FKM<br>- <p><a href="https://content2.smcetech.com/pdf/XVD2.pdf" target="_blank">Series Catalog</a>

    SMC XVD2-02S High Vacuum Valve

    $1,142.25
    XVD2, High Vacuum Valve, Smooth VentSmooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male female) and Swagelok. Port size for the main supply is 1/4 and orifice is 3mm. Materials consist of SUS316L (body ...
    XVD2-02S
    $1,142.25
  • SMC XMH-16 High Vacuum Valve

    SMC XMH-16 High Vacuum Valve

    $272.55
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMH-16
    $272.55
  • <h2>XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types</h2><p><h3>Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.</h3>- Angle or in-line type<br>- SCS 13 body material (conforms to SUS304)<br>- A precision casting, unified composition prevents accumulation of gas<br>- More than 2 million cycles service life (air operated valve)<br>- Light weight and compact<p><a href="https://content2.smcetech.com/pdf/XM_XY.pdf" target="_blank">Series Catalog</a>

    SMC XMD-40 S.S. High Vacuum Angle/In-Line Valve

    $859.10
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMD-40
    $859.10
  • <h2>XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types</h2><p><h3>Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.</h3>- Angle or in-line type<br>- SCS 13 body material (conforms to SUS304)<br>- A precision casting, unified composition prevents accumulation of gas<br>- More than 2 million cycles service life (air operated valve)<br>- Light weight and compact<p><a href="https://content2.smcetech.com/pdf/XM_XY.pdf" target="_blank">Series Catalog</a>

    SMC XMA-40 S.S. High Vacuum Angle/In-Line Valve

    $397.60
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMA-40
    $397.60
  • SMC XMA-25 High Vacuum Valve

    SMC XMA-25 High Vacuum Valve

    $358.40
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMA-25
    $358.40
  • <h2>XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types</h2><p><h3>Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.</h3>- Angle or in-line type<br>- SCS 13 body material (conforms to SUS304)<br>- A precision casting, unified composition prevents accumulation of gas<br>- More than 2 million cycles service life (air operated valve)<br>- Light weight and compact<p><a href="https://content2.smcetech.com/pdf/XM_XY.pdf" target="_blank">Series Catalog</a>

    SMC XMA-16 S.S. High Vacuum Angle/In-Line Valve

    $330.40
    XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...
    XMA-16
    $330.40
  • SMC XLS-25-P5G High Vacuum Valve

    SMC XLS-25-P5G High Vacuum Valve

    $396.95
    XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows BalanceHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases...
    XLS-25-P5G
    $396.95
  • SMC XLS-25-P1G High Vacuum Valve

    SMC XLS-25-P1G High Vacuum Valve

    $396.95
    XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows BalanceHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases...
    XLS-25-P1G
    $396.95
  • <h2>XLH, High Vacuum Manual Angle Valve, Bellows Seal</h2><p><h3>High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.</h3>- High vacuum angle valve<br>- Type: manual, bellows seal<br>- Flange size: 16 ~ 50<br>- Heater type: H1 (80 C), H2 (100 C), H3 (120 C)<br>- Auto switches not available<br>- <p><a href="https://content2.smcetech.com/pdf/XL_US2.pdf" target="_blank">Series Catalog</a>

    SMC XLH-25 High Vacuum Valve

    $265.00
    XLH, High Vacuum Manual Angle Valve, Bellows SealHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The...
    XLH-25
    $265.00
  • <h2>XLH, High Vacuum Manual Angle Valve, Bellows Seal</h2><p><h3>High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.</h3>- High vacuum angle valve<br>- Type: manual, bellows seal<br>- Flange size: 16 ~ 50<br>- Heater type: H1 (80 C), H2 (100 C), H3 (120 C)<br>- Auto switches not available<br>- <p><a href="https://content2.smcetech.com/pdf/XL_US2.pdf" target="_blank">Series Catalog</a>

    SMC XLH-16 High Vacuum Valve

    $237.00
    XLH, High Vacuum Manual Angle Valve, Bellows SealHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The...
    XLH-16
    $237.00
  • SMC XLD-63D High Vacuum Valve

    SMC XLD-63D High Vacuum Valve

    $1,410.00
    XLD, Aluminum High Vacuum Angle Valve, Air OperatedHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve...
    XLD-63D
    $1,410.00
  • <h2>XLD, Aluminum High Vacuum Angle Valve, Air Operated</h2><p><h3>High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.</h3>- Light weight and compact<br>- Uniform baking temperature<br>- High fluorine resistance<br>- Low outgassing<br>- Little heavy metal contamination<br>- <p><a href="https://content2.smcetech.com/pdf/XL_US2.pdf" target="_blank">Series Catalog</a>

    SMC XLD-50 Aluminum, High Vacuum Angle Valve

    $1,000.00
    XLD, Aluminum High Vacuum Angle Valve, Air OperatedHigh vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve...
    XLD-50
    $1,000.00