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Chillers

SMC Thermo-Chillers • Process Cooling

SMC Industrial Chillers — Precision Process Cooling, End to End

Shop the full SMC thermo-chiller catalog: low-GWP refrigerated units, benchtop precision and chemical chillers, rack-mount systems, high-performance heat exchangers, SEMI-standard semiconductor chillers, circulating baths, and factory spare parts. Every model delivers ±0.1°C temperature stability, proven reliability, and authorized-distributor support.

763+
SKUs In-Catalog
9
Chiller Subcategories
±0.1°C
Temp Stability
(±0.01°C SEMI)
0.2 – 30
kW Cooling Range
Authorized
SMC Distributor
Full Warranty & Support
The Full SMC Chiller Lineup

One Authorized Distributor. Every SMC Thermo-Chiller Family.

An industrial chiller removes heat from a process or piece of equipment and transfers it to the surrounding environment through a closed-loop refrigeration cycle. SMC's thermo-chiller portfolio covers the full spectrum — from 0.2 kW benchtop units used in analytical instruments, through rack-mounted 1.2 – 1.8 kW systems for test labs, compact 1.3 – 5.9 kW units for machine tools and laser processing, large-capacity 15 – 30 kW inverter-driven chillers for high-heat production lines, to SEMI-certified semiconductor fab chillers running fluorinated coolants.

Automation Distribution stocks the entire catalog, including the new low-GWP lineup (R-454C, R-32, and COâ‚‚) that meets EPA AIM Act, CARB, and EU F-Gas thresholds. If you're replacing a legacy HRS, HRZ, HRL, or HRSH unit, we can map your existing model to its modern low-GWP drop-in successor.


Shop by Subcategory

Nine Chiller Subcategories. One Click to the Right Fit.

Most Popular

Low GWP Chillers

R-454C, R-32, and COâ‚‚ refrigerants. Drop-in replacements for legacy HFC chillers. EPA AIM Act and CARB compliant. 1.2 – 30.5 kW across HRSF, HRSC, HRSHF, HRRF, HRZC, and HRLF series.

Shop Low GWP →
General Purpose

General Use Compact Chiller

Compact refrigerated thermo-chillers for machine tools, laser equipment, welding, and general production cooling. Single-phase power, PID temperature control, multi-alarm monitoring.

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Lab & Test

Benchtop Precision Chiller

Compact Peltier-based and refrigerated benchtop units for analytical instruments, lasers, and precision laboratory equipment. High thermal stability in a minimal footprint.

Shop Benchtop Precision →
Chemical

Benchtop Chemical Chiller

Benchtop chillers engineered for aggressive or corrosive process fluids. Chemically resistant wetted materials, sealed design, and tight temperature control for wet chemistry and semiconductor cleaning baths.

Shop Benchtop Chemical →
19″ Rack

Rack Mount Chiller

HRRF series fits a standard 19″ instrumentation rack. 1.2 or 1.8 kW, air- or water-cooled, RS-232C/RS-485 communication. Ideal for integrating cooling into existing test rigs and equipment cabinets.

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Heat Exchanger

High Performance Heat Exchanger

Non-refrigerated thermo-coolers that use facility water or a separate chiller as the heat sink. Low-noise, compressor-free design for temperature-stable cooling where a refrigerant isn't practical.

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Semiconductor

SEMI Standard Chiller

HRZ-F series. SEMI S2, S8, F47 certified for semiconductor fab use. EU F-Gas compliant. Pump-inverter and dual-inverter configurations for fluorinated coolants and glycol service.

Shop HRZ-F SEMI →
Bath

Circulating Bath

Open-bath circulators for temperature-controlled immersion and sample conditioning. Precision heating and cooling in a single unit for calibration, viscometry, and laboratory process work.

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Service

Spare Parts — Chillers

Factory-original SMC replacement parts: filters, pumps, sensors, circulation hoses, seal kits, and DI water resin cartridges. Keep your existing installed base running while planning your next upgrade.

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Specifying a New Chiller in 2026?

Start With the Low GWP Lineup

The EPA HFC Management Rule took effect January 1, 2026, and the Technology Transitions Rule caps most new industrial process chillers at 700 GWP. If you're buying new, SMC's low-GWP R-454C, R-32, and COâ‚‚ chillers are engineered as drop-in replacements for legacy HFC units — same footprint, same port sizes, same performance.

Chiller Selection Basics

Three Decisions That Narrow the Catalog Fast

Decision 1

Air-Cooled vs. Water-Cooled

Air-cooled units dissipate heat directly into ambient air via fans — simpler install, no facility water required, but sensitive to ambient temperature.

Water-cooled units reject heat to a facility water loop or cooling tower — higher efficiency at high loads, quieter, but requires facility water infrastructure.

Decision 2

Refrigerated vs. Peltier / Heat Exchanger

Refrigerated chillers (HRSF, HRSC, HRSHF, HRZC) use a compressor cycle for heat loads above ~1 kW and set points below ambient.

Peltier / heat-exchanger units (benchtop precision, high-performance heat exchangers) are compressor-free — lower-noise, smaller-footprint, and reject heat to facility water when a refrigerant isn't practical.

Decision 3

Standard Coolant vs. DI / Fluorinated

Standard water / glycol works for most machine tool, laser, and general process loops.

Deionized water requires copper-free wetted materials (HRLF laser chillers, select HRRF rack units). Fluorinated fluids (Fluorinert, GALDEN) for SEMI semiconductor applications use HRZC or HRZ-F.


Series Quick Reference

SMC Chiller Series at a Glance

Series Type Capacity Refrigerant Best Fit Application
HRSF Refrigerated, Low GWP 1.3 – 20.5 kW R-454C (GWP 146) Machine tools, lasers, general manufacturing
HRSC Refrigerated, COâ‚‚ 1.3 – 11.5 kW COâ‚‚ (GWP 1) Lowest-GWP option, non-flammable facilities, air freight
HRSHF Smart Inverter 15.7 – 30.5 kW R-32 (GWP 675) Large-capacity production cooling, outdoor-rated
HRRF Rack Mount (19″) 1.2 – 1.8 kW R-454C Labs, test equipment, space-constrained installs
HRZC SEMI Double Inverter 2 – 10 kW COâ‚‚ (GWP 1) Semiconductor fab, fluorinated fluids, ±0.02°C
HRZ-F SEMI Legacy F-Gas 2 – 10 kW EU F-Gas Compliant Existing SEMI installs, fluorinated / glycol coolants
HRLF Dual Channel Laser 19 – 21.5 kW (+ 1 kW) R-454C High-power fiber, COâ‚‚, YAG laser cooling

Legacy HRS, HRZ, HRL, and HRSH series are still supported for existing installations — browse Spare Parts or contact us for replacement sizing.


Common Applications

Where SMC Chillers Go to Work

Machine Tool / CNC

Spindle, coolant, and hydraulic cooling on mills, lathes, and grinding centers. HRSF / HRSC for most platforms.

Laser Processing

Fiber, COâ‚‚, and YAG laser cutting, welding, marking. HRLF dual-channel for high-power oscillator + optical head.

Semiconductor Fab

Wafer processing, etch, CVD, metrology. HRZC (COâ‚‚) or HRZ-F for SEMI S2/S8/F47.

Lab & Analytical

Instruments, environmental chambers, test benches. Benchtop precision chillers and HRRF rack units.

Medical Device

MRI auxiliary cooling, sterilization, precision medical manufacturing. Benchtop chemical for corrosive process fluids.

EV / Battery

Battery formation, cycle testing, thermal shock chambers. HRSHF large capacity for cell-level heat loads.

Plastics & Extrusion

Mold, platen, melt-stream, and granulator cooling in injection molding and extrusion lines.

Food & Pharma Process

Jacketed vessels, pasteurization loops, chromatography columns. Benchtop to general-purpose units as needed.


Frequently Asked Questions

Industrial Chillers: Common Questions

What is an industrial chiller and how does it work?

An industrial chiller removes heat from a process fluid or piece of equipment and rejects it to the surrounding environment. Refrigerated chillers use a closed vapor-compression cycle: refrigerant absorbs heat from the process fluid through an evaporator, a compressor raises the refrigerant pressure and temperature, and a condenser (air- or water-cooled) dissipates that heat before the refrigerant returns to the evaporator. Non-refrigerated heat exchangers and Peltier-based benchtop chillers transfer heat without a compression cycle.

What types of SMC chillers are available?

Automation Distribution stocks nine SMC chiller subcategories: Low GWP Chillers (R-454C, R-32, COâ‚‚), General Use Compact, Benchtop Precision, Benchtop Chemical, Rack Mount, High Performance Heat Exchangers, SEMI Standard, Circulating Baths, and Spare Parts.

How do I choose the right chiller for my application?

Start with five inputs: required cooling capacity (kW or BTU/hr), process fluid set-point temperature, ambient conditions at the install location, process fluid type (water, glycol, DI water, fluorinated), and facility constraints (power available, footprint, noise sensitivity, outdoor/indoor, flammable-refrigerant policy). Those five narrow the catalog to one or two series quickly. If you'd like a sizing review, share your current chiller model number or the heat load of the equipment you're cooling and we'll map it.

What's the difference between air-cooled and water-cooled chillers?

Air-cooled chillers dissipate heat into ambient air using integrated fans — simpler to install, no facility water loop required, but their efficiency drops when ambient temperature is high. Water-cooled chillers reject heat to a separate water source (facility loop or cooling tower) — higher efficiency at high heat loads, quieter operation, and more stable in hot environments, but they require an accessible water loop. Most SMC series offer both configurations.

Do SMC chillers support precision temperature control?

Yes. Standard models hold ±0.1°C across a set-point range that can span −20 to 90°C depending on the series. SEMI-standard HRZC chillers can hold ±0.02°C under stable heat load, and benchtop precision units are available for laboratory applications requiring even tighter control. All models use PID control with multi-alarm monitoring and support serial RS-232C/RS-485, Ethernet Modbus, or contact/analog I/O for integration with PLCs and HMIs.

Should I buy a new high-GWP chiller or a low-GWP model?

For new chiller purchases in 2026 and beyond, the practical answer is low-GWP. The EPA Technology Transitions Rule caps most new industrial process chillers at 700 GWP, the HFC Management Rule is in effect, and state-level regulations (CARB in particular) are actively enforced. SMC's low-GWP lineup is engineered as drop-in replacements for legacy HFC units with matching dimensions and performance, so choosing low-GWP now avoids the risk of having to swap equipment later. Existing installed chillers are grandfathered and can continue operating at end-of-life.

What maintenance do SMC chillers require?

Routine maintenance includes checking circulating fluid level, inspecting and cleaning the condenser coil or water strainer, verifying flow and pressure, and replacing in-line filters or DI resin cartridges as called out in the model manual. SMC chillers are designed for front-panel access and most wear items are stocked as factory-original spare parts. Typical service life is 8 – 15 years with proper maintenance.

Does Automation Distribution provide chiller sizing and technical support?

Yes. As an authorized SMC distributor, we provide pre-sale sizing reviews, replacement mapping for legacy HRS, HRZ, HRL, and HRSH units, lead-time confirmation, and post-sale technical support. Contact our team with your current chiller model, heat load, and fluid type, or use the SMC Thermo-Chiller Model Selection Software to configure online.


Ready to Browse

The Full 763-SKU Catalog Is Below

Use the left-side filters to narrow by series, power supply, pipe thread, cooling capacity, or price — or jump directly to a subcategory:

Not Sure Which Chiller Fits?

Share your current chiller model number, heat load, set-point temperature, and process fluid. Our application team will confirm the right SMC series, verify drop-in fit against your existing footprint, and provide lead times.

Request a Chiller Evaluation → Read the 2026 Transition Guide →

Verify all specifications against current SMC documentation prior to installation. Specifications subject to change without notice. Automation Distribution is an authorized SMC distributor offering the full SMC thermo-chiller catalog with factory warranty and technical support.