HRZ Series Circulating Fluid Temperature Controller Thermo-chiller Fluorinated Fluid Type
Proven performance with semiconductor process equipment, with a wide; range of features such as high temperature stability, wide temperature; range, failure testing, external signal;
All models conform to safety standards;
Conforms to UL and SEMI specifications, CE marking
Additional Information
Cooling Capacity:
2 kW
Temperature Range Setting:
-20 to 90℃
Option:
DeviceNet Communication + Circulating Fluid Automatic Recovery