High Vacuum Products

XLH Series Aluminum High Vacuum Angle Valve Manual/Bellows SealStrong against fluorine;Minimal gas emissions;Minimal heavy metal contamination

XLJ Series Vacuum Angle Valve with Release ValvePrevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber;Reduced piping labor due to the built-in release valve structure

XLDV Series Aluminum High Vacuum Angle Valve Air Operated/With Solenoid ValveStrong against fluorine;Minimal gas emissions;Minimal heavy metal contamination

XLF-2 Series Aluminum High Vacuum Angle Valve Normally Closed, O-ring SealAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XLAV Series Aluminum High Vacuum Angle Valve Air Operated, With Solenoid ValveAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XGTP Series Parallel Seal Type Slit ValveLong service life 3 million cycles (at ordinary temperature);Low particle generation Reduced by 1/5 or more (compared with the current product);Easier maintenance; Easy replacement of bellows; Gate can be...

XGTP Series Parallel Seal Type Slit ValveLong service life 3 million cycles (at ordinary temperature);Low particle generation Reduced by 1/5 or more (compared with the current product);Easier maintenance; Easy replacement of bellows; Gate can be...

XGTP Series Parallel Seal Type Slit ValveLong service life 3 million cycles (at ordinary temperature);Low particle generation Reduced by 1/5 or more (compared with the current product);Easier maintenance; Easy replacement of bellows; Gate can be...

XMA Series Stainless Steel High Vacuum Angle Valve Normally Closed/Bellows SealA precision casting, unified composition prevents accumulation of gas;Mounting interchangeable with Aluminum High Vacuum Angle Valve;?Series XL (Series XM);;Note) Size 16 is...

XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line TypesSeries XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body...

XLAV Series Aluminum High Vacuum Angle Valve Air Operated, With Solenoid ValveAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XSA Series Normal Close High Vacuum Solenoid ValveFemale thread type (Rc, NPT) added [New];Minimum operating pressure 1×10-6Pa(abs);Leakage Internal 1.3×10-9Pa·m3/s, External 1.3×10-11Pa·m3/s;2 types of fitting;Power consumption Max.25%reduction;Weight...

XSA Series Normal Close High Vacuum Solenoid Valve Female Thread TypeFemale thread type (Rc, NPT) added [New];Minimum operating pressure 1×10-6Pa(abs);Leakage Internal 1.3×10-9Pa·m3/s, External 1.3×10-11Pa·m3/s;2 types of fitting;Power consumption Max...

XLA-2 Series Aluminum High Vacuum Angle Valve Normally Closed/Bellows SealAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XLF-2 Series Aluminum High Vacuum Angle Valve Normally Closed, O-ring SealAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XLC-2 Series Aluminum High Vacuum Angle Valve Double Acting, Bellows SealAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XGTP Series Parallel Seal Type Slit ValveLong service life 3 million cycles (at ordinary temperature);Low particle generation Reduced by 1/5 or more (compared with the current product);Easier maintenance; Easy replacement of bellows; Gate can be...

XLG-2 Series Aluminum High Vacuum Angle Valve Double Acting, O-ring SealAluminum bodied; Uniform baking temperature; Lightweight, Compact; Minimal outgassingr; Minimal contamination from heavy metals;Possible to replace the bellows

XLJ Series Vacuum Angle Valve with Release ValvePrevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber;Reduced piping labor due to the built-in release valve structure

XSA Series Normal Close High Vacuum Solenoid ValveFemale thread type (Rc, NPT) added [New];Minimum operating pressure 1×10-6Pa(abs);Leakage Internal 1.3×10-9Pa·m3/s, External 1.3×10-11Pa·m3/s;2 types of fitting;Power consumption Max.25%reduction;Weight...